AN-NIR-090
2021-03
Quality Control of Mixed Phosphoric, Sulfuric, Nitric, and Hydrofluoric Acids
Fast and reliable detection of different acids in mixtures with NIR spectroscopy
Резюме
Determination of the acid concentration in mixed acid solutions is a critical quality control step for successful etching processes. While primary analytical methods such as thermometric titration are well known, difficulties arise when mixtures of three or more acids need to be analyzed or if the time to result is a critical aspect. This application note discusses an alternative near-infrared (NIR) spectroscopy method that can reliably determine all parameters within a minute.
Results
27 measured Vis-NIR spectra (Figure 2) were used to create a prediction model for quantification of the different acid concentrations (H3PO4, H2SO4, HNO3, and HF). The quality of the prediction models was evaluated using correlation diagrams, which show a very high correlation between Vis-NIR prediction and primary method values. The respective figures of merit (FOM) display the expected precision of a prediction during routine analysis.
Result H3PO4
Figures of merit | Value |
---|---|
R2 | 0.969 |
Standard error of calibration | 0.290% |
Standard error of cross-validation | 0.410% |
Result H2SO4
Figures of merit | Value |
---|---|
R2 | 0.9448 |
Standard error of calibration | 0.243% |
Standard error of cross-validation | 0.297% |
Result HNO3
Figures of merit | Value |
---|---|
R2 | 0.901 |
Standard error of calibration | 0.279% |
Standard error of cross-validation | 0.345% |
Result HF
Figures of merit | Value |
---|---|
R2 | 0.936 |
Standard error of calibration | 0.211% |
Standard error of cross-validation | 0.276% |
Conclusion
This application note demonstrates the feasibility of the DS2500 Liquid Analyzer for the determination of individual acid concentrations in a mixed acid solution. Vis-NIR spectroscopy enables fast determinations with high accuracy, and therefore represents a suitable alternative to the standard method (Table 6).
Parameter | Method | Time to result and workflow |
---|---|---|
H3PO4, H2SO4, HNO3, and HF content | Thermometric titration (three-fold determination) | ∼25 min. preparation for the determination of the titer and blank value + 12 min. (3 times 4 min.) for the titration measurement |
H3PO4, H2SO4, HNO3, and HF content | NIR Spectroscopy | 1 minute for NIR spectroscopy measurement |
Internal reference: AW NIR CN-0018-092020