AN-S-365

Anionic impurities in concentrated semiconductor grade ammonium hydroxide

Summary

Ultrapure chemicals are required in the semiconductor industry. Ionic impurities may lead to compromised products. This application describes the determination of anionic impurities in semiconductor grade 28% ammonium hydroxide solution. To avoid matrix disturbances, Inline Neutralization and Inline Preconcentration with Matrix Elimination needs to be applied.

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Metrohm Vietnam Co., LTD

Park IX Building 08 Phan Dinh Giot Street, Ward 2 , Tan Binh District
700000 Ho Chi Minh City

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